Cavendish and Lady Waterpark were both succeeded by their son Richard, the second Baron and third Baronet.

As of 2013[update], the titles are held by the latter's great-nephew, the eighth Baron, who succeeded in that year.

He was succeeded by his son, the aforementioned Sir Henry Cavendish, 2nd Baronet.

This Henry was the eldest son of Sir William Cavendish by his wife Bess of Hardwick, and thus elder brother of William Cavendish, 1st Earl of Devonshire.

One son, Robert Cavendish, was allegedly the result of a lifelong relationship with a mistress whom he kept at Ufton Manor in Oakerthorpe.