Chillicothe Township is located in Peoria County, Illinois, United States.

As of the 2010 census, its population was 8,364 and it contained 3,694 housing units.

[2] According to the 2010 census, the township has a total area of 20.44 square miles (52.9 km2), of which 17.92 square miles (46.4 km2) (or 87.67%) is land and 2.52 square miles (6.5 km2) (or 12.33%) is water.

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