He died in 1613 and was succeeded by his son: Henri de Luxembourg (1583–1616), second duke, was father of Marguerite-Charlotte de Luxembourg (1607–1680), heiress to the title.
Their son, Henri-Léon d'Albert de Luxembourg (1630–1697), fourth duke, resigned the peerage in 1661.
He pursued his father's lawsuit claiming precedence based on the princely origin of his ancestors as well as the seniority of his title.
He was the son of Charles-Anne-Sigismond, duc d'Olonne (1721–1777) and grandson of the last duke's first cousin and heir-male Charles-Paul-Sigismond, duc de Bouteville (1697–1785); both these men had declined the peerage.
His son Charles-Emmanuel-Sigismond de Montmorency-Luxembourg (1774–1861) was the last holder of the title, though the last male member of the Montmorency-Luxembourg family was Anne-Edouard-Louis-Joseph (1802–1878), duc de Beaumont.