Annexed by the Habsburg Empire in 1772, the remaining ducal title ceased to exist in 1918 with the lands being reincorporated into the Second Polish Republic.

The duchy was created in 1315 in the aftermath of the 12th century fragmentation of Poland on these southeastern estates of the original Duchy of Silesia, which the Polish High Duke Casimir II the Just had split off the Seniorate Province and granted to the Silesian duke Mieszko IV Tanglefoot in 1177.

In 1327 his heir Duke Jan I the Scholastic paid homage to King John of Bohemia and likewise many other Silesian duchies, Oświęcim became a vassal of the Bohemian Crown.

Jan had no male heirs and sold his duchy to King Casimir for the price of 3,000,000 Prague groschen three years later.

At the time the duchy was being sold it consisted of: two towns (Oświęcim and Kęty), two ducal castles (in Oświęcim and Wołek) and 45 villages:[2] Bielany, Łęki, Babice, Lipnik, Osiek, Brzeszcze, Monowice, Dwory, Stara Polanka, Nowa Polanka, Włosienica, Poręba, Grojec, Sparowicze (considered lost), Nidek, Witkowice, Głębowice, Bulowice, Czaniec, Malec, Kańczuga, Nowa Wieś, Roczyny, Broszkowice, Brzezinka, Rajsko, Franciszowice (Pławy), Przecieszyn, Skidziń, Wilczkowice, Wilamowice, Hecznarowice, Bujaków, Kozy, Mikuszowice, Pisarzowice, Hałcnów, Biertułtowice, Komorowice, Żebracz, Bestwina, Dankowice, Stara Wieś, Jawiszowice, Harmęże.