Then the name was changed to Shuck Township on an unknown date, then to Harwood Township on February 22, 1870 in Abel Harwood (1814-1891), a delegate to the Illinois state constitutional convention, representing Champaign and other counties.

[2] Harwood is Township 22 North, Range 10 East of the Third Principal Meridian.

[3] (This list is based on USGS data and may include former settlements.)

As of the 2020 census[1] there were 610 people, 256 households, and 162 families residing in the township.

34.80% of all households were made up of individuals, and 27.70% had someone living alone who was 65 years of age or older.