As of the 2020 census, its population was 879 (down from 930 at 2010[4]) and it contained 346 housing units.

The township was named after Robert Dale Owen of New Harmony.

It lost a one-mile (1.6 km) strip along its southern border to Union Township which was created in 1889, leaving Owen a five-mile (8 km) by five-mile square.

[6] According to the 2010 census, the township has a total area of 24.98 square miles (64.7 km2), all land.

[4] (This list is based on USGS data and may include former settlements.)