The research activities in microelectromechanical systems (MEMS) started in the early 1990s with the development of new materials for microbolometers for room-temperature infrared detection.
Based on the success of this IR radiation detector work on flexible substrates,[5] the group expanded to other sensing functionalities like flow, tactile, pressure, force and most recently acceleration.
Today, the group is focusing on multifunctional, conformal sensor arrays with integrated bias, read-out and power capabilities, the so-called Smart Skin,[6] for aerospace, defense and medical applications.
One of the contributions of the research group is the demonstration of random telegraph signal (RTS) noise as a non-destructive characterization and reliability tool in nanoelectronics.
Today, this research thrust area is investigating the effect of extended drain region on noise and reliability of LDMOS structures.