The 2020 census found 1,019 people in the township.

Located in the southwestern corner of the county along the Indiana line, it borders the following townships: Part of the village of Payne is located in northern Benton Township along the border with Harrison Township.

Statewide, other Benton Townships are located in Hocking, Monroe, Ottawa, and Pike counties.

[4] The township is governed by a three-member board of trustees, who are elected in November of odd-numbered years to a four-year term beginning on the following January 1.

There is also an elected township fiscal officer,[5] who serves a four-year term beginning on April 1 of the year after the election, which is held in November of the year before the presidential election.