In 1694, a Buddhist monk named Shubi requested that a statue of Mazu be brought to Beigang from the Chaotian Temple in her hometown of Meizhou in Fujian.

In 1700, Chen Li-Shum donated a building lot and raised the funds to erect Beigang's own Chaotian Temple.

In 1770, Penkang Magistrate Hsueh Chao-heng considered that the temple too simple to live up to the dignity of Goddess Matsu.

In 1854 a number of ranking officials initiated a third project, expanding the temple into a palace-type architectural complex.

Since 2020 and the beginning of the COVID-19 pandemic, a Buddhist Liberation Rite of Water and Land is sponsored by Chaotian Temple to pray for the eradication of the virus.