With the organization of municipalities on October 1, 1889, Chita District was divided into four towns (Handa, Kamezaki, Yokosuka, Ono) and 63 villages.
In December 1890, Narawa and Tokoname were also elevated to town status, followed by Taketoyo in February 1891, Arimatsu in September 1892 and Utsumi in November 1893.
This left Chita District with 16 towns and nine villages at the end of World War II.
In October 1951, the village of Onizaki became a town, followed by Asahi in April 1952, Kosugaya in July 1952, Agui in January 1953.
Kosugaya Town was dissolved on March 31, 1957, with portions joining neighboring Tokoname and Mihama.