Directed assembly of micro- and nano-structures

[1] To control the surface interactions enabling sub-10 nm resolution, a team consisting of Massachusetts Institute of Technology, University of Chicago, and Argonne National Laboratory developed a way to use vapor-phase deposited polymeric top layer on the block co-polymer film in 2017.

The patterns are made by mechanical deformation of imprint resist (monomer or polymer formulation) and subsequent processes.

Then, it is cured by heat or ultraviolet light, and tight level of the resist and template is controlled at appropriate conditions depend on our purposes.

With the goal of mitigating these disadvantages while applying nanotechnology to electronics, researchers at the National Science Foundation's Nanoscale Science and Engineering Center for High-Rate Nanomanufacturing (CHN) at Northeastern University with partners UMass Lowell and University of New Hampshire have developed a directed assembly process of single-walled carbon nano tube (SWNT) networks to create a circuit template that can be transfer from one substrate to another.

[7] Self-assembled monolayers (SAMs) are made of a layer of organic molecules which forms naturally as an ordered lattice on the surface of a desired substrate.

With self-assembly, positioning of SAMs is used to define chemical system precisely to find the target location in a molecular-inorganic device.

Moreover, the frequency and amplitude of the waves can be modified in order to achieve a more accurate control of the particular behavior of the droplet or cell.

[10] Normal approaches, such as critical dimension-scanning electron microscopy (CD-SEM), to obtain data for pattern quality inspection take too much time and is also labor-intensive.

On the other hand, the optical scatterometer-based metrology is a non-invasive technique and has very high throughput due to its larger spot size.