[2] Intel started using Cu metal layers and FSG on its 1.2 GHz Pentium processor at 130 nm complementary metal–oxide–semiconductor (CMOS).
Taiwan Semiconductor Manufacturing Company (TSMC) combined FSG and copper in the Altera APEX.
Potassium fluororichterite based materials are composed from tiny interlocked rod-shaped amphibole crystals; they have good resistance to chemicals and can be used in microwave ovens.
Fluorosilicate glass-ceramics with sheet structure, derived from mica, are strong and machinable.
They find a number of uses and can be used in high vacuum and as dielectrics and precision ceramic components.