Harvey C. Nathanson

MEMS devices, which are made using integrated circuit fabrication techniques, are composed of small moving mechanical elements that generally range from 1 to 100 micrometres (0.001 to 0.1 mm) in size.

Typical MEMS devices include the accelerometers found in smartphones and video game controllers, and the gyroscopes used in automobiles and wearables.

[1] It was developed also with William E. Newell at Westinghouse Research Labs in Pittsburgh, PA., and patented as a Microelectric Frequency Selective Apparatus.

[3] In their work developing similar devices, Nathanson, Wickstrom and team pioneered a method of batch fabrication in which layers of insulators and metal on silicon wafers are shaped and undercut through the use of masks and sacrificial layers, a process that would later become a mainstay of MEMS manufacturing.

[4] In 1973 he patented the use of millions of microscopically small moving mirrors to create a video display of the type now found in digital projectors.