However, in 1433 Johann oder Hemmann von Liebegg, the last male heir of the family, died.
At the height of their power, in 1561/62, Augustin von Luternau demolished the medieval castle, building on its site a late-Gothic residence.
Reinhard built a new castle and residence hall south of the Luternauhaus (Luternau House) in 1617.
He owned the castle for about half a century, but in 1668 traded it to his brother in law Johann Friedrich von Breitenlandenberg.
A few decades later the 1798 French invasion and the Helvetic Republic swept away the old medieval system of noble landlords who ruled over villages and estates.
While the von Diesbach family retained their castles, they lost their land holdings, including the Twing of Liebegg.
In 1875 Friedrich Bernhart von Diesbach sold Liebegg Castle to the wealthy industrialist Guido Hunziker-Zuest from Aarau.