Mechanical probe station

A mechanical probe station is used to physically acquire signals from the internal nodes of a semiconductor device.

The probe station utilizes manipulators which allow the precise positioning of thin needles on the surface of a semiconductor device.

If the device is being electrically stimulated, the signal is acquired by the mechanical probe and is displayed on an oscilloscope or SMU.

Probe stations initially were designed to manage micron level semiconductor wafer testing.

systems like the VERSA can also manage testing individual chips or die as well as large +24" application boards with decapsulated parts.

An automated probe station by Cascade Microtech
thermal testing, wafers, chips, die, and decapsulated application boards
Versa Probe system by Micromanipulator