In addition, Onto Innovation provides a broad range of software products designed to improve yield, control processes and reduce manufacturing costs.

The company Otto Rudolph established continued to evolve, making breakthroughs in ellipsometry including the first production-oriented ellipsometer for thin, transparent film measurements.

At that time, Dr. Spanier retired his active role in the company and semiconductor industry veteran Paul F. McLaughlin was named as CEO.

In subsequent years, the company established additional offices in all semiconductor manufacturing regions of the world including Japan, Europe, South Korea, Taiwan and Singapore.

NanoPhotonics GmbH, Mainz, Germany (unpatterned wafer inspection); and Azores Corp., Wilmington, MA (Rudolph's entry into the advanced packaging and FPD lithography markets).

[6] In January 2017, Voce Capital Management LLC in a letter to investors, urged merging semiconductor-equipment makers Rudolph Technologies Inc. and Nanometrics Inc.[6] The merger eventually occurred and closed on October 30, 2019.

In connection with the 2017 discussions, in February 2016, Nanometrics and Rudolph entered into a mutual confidentiality agreement, which was subsequently extended in January 2017.

It is a multiple-step process during which electronic circuits are gradually built by adding elements and layers of material on a substrate made of pure silicon, or various compounds in the case of specialized applications, hundreds of steps performed by specialized process tools are required before the wafer moves to a final packaging facility.

[9] Rudolph Technologies, a predecessor to Onto Innovation, described its JetStep system as being suitable for wafers up to 450mm and rectangular panels up to Gen 3.5 size (720mm x 600mm).