SÜSS MicroTec

Suss Microtec is a supplier of equipment and process solutions for the semiconductor, nano and microsystems technology and related markets with headquarters in Garching near Munich.

The company’s microstructuring machines, equipment, and systems, such as photolithographic devices, are used in the manufacture of processors, memory chips, MEMS, LEDs, and other microsystems technology components.

The portfolio includes products for back-end lithography, wafer bonding, and photomask cleaning, complemented by micro-optical components.

[3] The order from Siemens in 1963 to develop a simple photolithography device laid the foundation for the company’s later direction and was its first step into the semiconductor industry.

[3] With the development of the semiconductor industry, Suss Microtec started to manufacture diamond scribers and spin coaters.

Suss MicroTec, whose name already stood for photolithography in the research and development sector, now also focused on customers from the manufacturing industry.

As a result, the company changed its business policy and initiated a focus on core competencies and targeted acquisitions.

With the acquisition of Tamarack Scientific in 2012, the company added advanced laser processing technology for microstructure transfer to its lithographic portfolio.

[7] In addition, another technology was added in the same year when the company acquired the inkjet printing business of solar specialist Meyer Burger, PiXDRO.

Since the foundation of the company GMA in 1989, which emerged from the former Elektromat, in Sacka near Dresden, Suss Microtec has been producing its own systems for testing micro components.

With the acquisition of Hamatech APE[9] at the beginning of 2010 and the sale of the Test Systems division,[6] the Suss Group further expanded its core competence in wet processes on the one hand and set a clear focus on the microstructuring of components on the other.

Suss Microtec is continuously expanding its efforts in the area of research and development in order to increase the speed of innovation.