[8] ASML's earlier competition consisted of Ultratech, Canon and Nikon, MKS Instruments, Lam Research and Cadence Design Systems.

[citation needed] Since immersion lithography was first proposed by Burn-Jeng Lin in the 1970s,[9] ASML cooperated with Taiwan Semiconductor Manufacturing (TSMC).

[12] Deep ultraviolet (DUV) lithography devices from ASML use light that penetrates the UV spectrum to print the tiny features that form the microchip's structure.

[18] ASML is working on the next generation of EUV systems, with the first shipments for R&D purposes shipped to Intel in December 2023, and TSMC in late 2024.

[2][20] ASML's EUV machines have experienced a significant surge in demand in recent years, driven by modern electronics' increasing complexity and performance requirements.

[24] The success of the PAS 5500 line propelled ASML into strong competition with Canon and Nikon, who were the leaders in that era of the lithography market.

[23] In 1997, ASML began studying a shift to using extreme ultraviolet and in 1999 joined a consortium, including Intel and two other U.S. chipmakers, in order to exploit fundamental research conducted by the US Department of Energy.

[25] In 2000, ASML acquired the Silicon Valley Group (SVG), a US lithography equipment manufacturer also licensed for EUV research results, in a bid to supply 193 nm scanners to Intel Corp.[26][27] In 2002, it became the largest supplier of photolithography systems.

[28] At the end of 2008, ASML experienced a large drop in sales, which led management to cut the workforce by about 1000 worldwide, mostly contract workers[29] and to apply for support from the Dutch national unemployment fund to prevent even larger layoffs.

[35] In November 2013, ASML paused development of 450 mm lithography equipment, citing uncertain timing of chipmaker demand.

[37] In June 2016, ASML announced their plans to acquire Taiwan-based Hermes Microvision Inc. for about $3.1 billion to add technology for creating smaller and more advanced semiconductors.

[18] In November 2020, ASML revealed that it had acquired the German optical glassmaking firm Berliner Glas Group in order to meet increasing need for components for its EUV systems.

[44] In October 2023, Dutch newspaper NRC Handelsblad reported that the former employee who "allegedly" stole data about ASML's technology subsequently went to work for Huawei.

Export Administration Regulations (such as China, Cuba, Iran, North Korea, and Syria) in order to remain compliant with U.S.

[51] On 6 September 2024, the Dutch government tightened export controls on certain ASML chipmaking equipment, aligning its policy with U.S. restrictions to limit China's access to advanced technology amid safety and geopolitical concerns.