Active vibration control

With this application, a precision industrial process can be maintained on a platform essentially vibration-free.

For example, the production of semiconductor wafers requires that the machines used for the photolithography steps be used in an essentially vibration-free environment or the sub-micrometre features will be blurred.

These include traditional vibration dampers, shock absorbers, and base isolation.

[1][2][3][4][5][6] For effective active vibration control, the structure should be smart enough to sense external disturbances and react accordingly.

The smart structure involves sensors (strain, acceleration, velocity, force etc.

Test bench for active vibration control at the Fraunhofer Institute LBF. A piezo driven active engine mount cancels the vibration resulting from several motors on top of the Mount by inducing countervibrations.