Cantilever enhanced photoacoustic spectroscopy enables the detection of small amount of trace gases which is vital in many applications.
The sensitivity of the traditional membrane microphones is limited by electrical noise and the nonlinearity of the displacement of the mechanical sensor at high optical power levels.
[2] An extremely thin cantilever portion moves like a flexible door due to the pressure variations in the surrounding gas.
The so-called breathing effect occurs in capacitive measurement principle where the other electrode damps the movement of the sensor and restricts the dynamic range.
[2] Cantilever enhanced photoacoustics measuring technology can be used e.g. in detection and analysis of gases, liquids, and solid materials in applications of research, industry, environmental, safety, and security.