Electrostatic–pneumatic activation is an actuation method for shaping thin membranes for microelectromechanical and microoptoelectromechanical systems.
[1][2] This method benefits from operation at high speed and low power consumption.
Electrostatic-pneumatic MEMS devices usually consist of two membranes with a sealed cavity in between.
With direct electrostatic actuation on the membrane, a concave shape is achieved.
Since the cavity is filled with air, mechanical amplification is lower than hydraulic machinery with a non-compressible fluid.