Microoptoelectromechanical systems

MOEMS includes two major technologies, microelectromechanical systems and micro-optics.

Both these two technologies independently involve in batch processing similar to integrated circuits, and micromachining similar to fabrication of microsensor.

During 1991-1993, Dr. M. Edward Motamedi, a former Rockwell International innovator in the areas of both microelectromechanical systems and micro-optics, used internally the acronym of MOEMS for microoptoelectromechanical systems.

In 1993, Dr. Motamedi officially introduced MOEMS for the first time, as the powerful combination of MEMS and micro-optics, in an invited talk at the SPIE Critical Reviews of Optical Science and Technology conference in San Diego.

In this talk Dr. Motamedi introduced the figure below, for showing that MOEMS is the interaction of three major microtechnologies; namely micro-optics, micromechanics, and microelectronics.

This figure first was introduced by M. Edward Motamedi
Diagram of a digital micromirror showing the mirror mounted on the suspended yoke with the torsion spring running bottom left to top right (light grey), with the electrostatic pads of the memory cells below (top left and bottom right)
DLP CINEMA. A Texas Instruments Technology