Ethylenediamine pyrocatechol (EDP), also known as ethylenediamine-pyrocatechol-water (EPW), is an anisotropic etchant solution for silicon.
[1] A typical formulation consists of ethylenediamine, pyrocatechol, pyrazine and water.
[1] It is mainly used in research labs, and is not used in mainstream semiconductor fabrication processes.
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