Gas cabinet
A gas cabinet is a metallic enclosure which is used to provide local exhaust ventilation system for virtually all of the gases used or generated in the semiconductor, solar, MEMS, NANO, solar PV, manufacturing and other advanced technologies.
[1] The primary purpose of gas cabinets is to contain potential leaks in piping and fittings at the cylinder connection.
They need to adhere to the Compressed Gas Association and Semiconductor Equipment & Materials Institute codes.
In the absence of finite specifications or unknowns the user or designer should seek the assistance of an impartial consultant.
Such systems are designed to monitor a huge number of facility inputs and process sensors as per requirements.
[citation needed] The port and valve specifications for gas cabinets and distribution systems are an important part of the selection process.
Ports are openings in the manifold or distribution system where the inlet and outlet connections are produced.
Training is needed to properly handle and install VCR connections using a variety of non-resuseable crushable metal gasket materials.
Metal gaskets are essential in order to achieve high helium leak ratings.
The materials used to construct the gas cabinet are an important part of proper system selection.
The materials used for the casing and outer parts must have adequate structural strength, while the materials for the gas handling components must be compatible with the media, temperature requirements, and pressure ratings to prevent leakage, rupture, or contamination.
Aluminum is never used for tubing or fittings in modern industrial gas control & distribution systems since 316L stainless steel (optimum choice) is so available.
Copper can be used for low air, oxygen and other inert non-critical gases such as medical CFOS systems.
For ultra pure gasses 316L Stainless steel remains the optimum choice for many reasons.
Different grades (such as nylon, acetal, and polycarbonate) have varying properties, but most have strong chemical and corrosion resistance.
316L Stainless steel became industry standard for fittings, piping and controls in gas cabinets and distribution systems in the early 1980s.
