MEMS magnetic actuator

For a single turn of circular coil, the equations that govern its operation are:[3] The deflection of a mechanical structure for actuation depends on certain parameters of the device.

Whereas the number of turns of coil, its size (radius) and the amount of current passing through it determines its effect on the Applied Force.

The coils generate a moving magnetic field that courses wavelike down the successive windings along the stator tube.

Repeated propagating waves of magnetic flux will translate the rod down the tube's length, producing a useful stroke and force output.

The amount of motion generated by the material is proportional to the magnetic field provided by the coil system, which is a function of the electric current.

This type of motive device, which features a single moving part, is called an elastic-wave or peristaltic linear motor.

MEMS scale of dimensions
The Lumped Assumption
Magnetic actuation
Magnet material selection for static B-Field
Sputtering
Pulsed Layer Deposition