Microtechnology

[2] Around 1970, scientists learned that by arraying large numbers of microscopic transistors on a single chip, microelectronic circuits could be built that dramatically improved performance, functionality, and reliability, all while reducing cost and increasing volume.

Today, micromechanical devices are the key components in a wide range of products such as automobile airbags, ink-jet printers, blood pressure monitors, and projection display systems.

The process has also become more precise, driving the dimensions of the technology down to sub-micrometer range as demonstrated in the case of advanced microelectric circuits that reached below 20 nm.

Today, the term MEMS in practice is used to refer to any microscopic device with a mechanical function, which can be fabricated in a batch process (for example, an array of microscopic gears fabricated on a microchip would be considered a MEMS device but a tiny laser-machined stent or watch component would not).

In Europe, the term MST for Micro System Technology is preferred, and in Japan MEMS are simply referred to as "micromachines".

As an offshoot of researchers attempting to further miniaturize microtechnology, nanotechnology emerged in the 1980s, particularly after the invention of new microscopy techniques.