Roger Thomas Howe (born 1957 in Sacramento, California) is the William E. Ayer Professor of Electrical Engineering at Stanford University.
He was a faculty member at Carnegie-Mellon University from 1984-1985, at the Massachusetts Institute of Technology from 1985-1987, and at UC Berkeley between 1987-2005, where he was the Robert S. Pepper Distinguished Professor.
[8] Together with his Ph.D. student, William C. Tang, he co-invented the electrostatic comb drive,[9][10] which is a key building block for microsensors and actuators.
With his former colleague Tsu-Jae King Liu and their students, a low-temperature polycrystalline silicon germanium micromachining technology was developed that could be fabricated after standard CMOS electronics.
In 2015, he and Yu-Chong Tai were co-recipients of the IEEE Electron Devices Society’s Robert Bosch Micro and Nano Electro Mechanical Systems Award.