Richard Stephen Muller (born May 5, 1933) is an American professor in the Electrical Engineering and Computer Science Department of the University of California at Berkeley.

These processes preceded the creation of low cost, mass-produced commercial micro accelerometers, which are used in automotive collision sensors for airbag deployment.

Together with Richard M. White, he created BSAC (Berkeley Sensor & Actuator Center), an organization that produced many generations of academic researchers and intellectual properties in the MEMS field.

Muller received the degree of Mechanical Engineer (with highest honors) from the Stevens Institute of Technology, Hoboken, New Jersey, 1955; and his M.S.

Muller and his student Roger T. Howe created the process of surface micromachining using polysilicon (poly) as a structural material,[6] and silicon oxide as a sacrificial layer.