Thin Solid Films is a peer-reviewed scientific journal published 24 times per year by Elsevier.

It was established in July 1967.

The current editor-in-chief is J. E. Greene (University of Illinois at Urbana–Champaign).

The journal covers research on thin-film synthesis, characterization, and applications, including synthesis, surfaces, interfaces, colloidal behavior, metallurgical topics, mechanics (including nanomechanics), electronics, optics, optoelectronics, magnetics, magneto-optics, and superconductivity.

The journal is indexed and abstracted in: According to the Journal Citation Reports, the journal has a 2020 impact factor of 2.183.