The 10 μm process (10 micrometer process) is the level of MOSFET semiconductor process technology that was commercially reached around 1971,[1][2] by companies such as RCA and Intel.
The 10 μm process refers to the minimum size that could be reliably produced: the half-pitch, which is the distance between two 1-metal lanes, center to center, and the gate length of a transistor; those two values used to be identical in early nodes.
The smallest transistors and other circuit elements on a chip made with this process were around 10 micrometers wide.
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