ASE was created by Surface Technology Systems Plc (STS) in 1994 in the UK.
STS developed and first implemented the switched process, originally invented by Dr. Larmer in Bosch, Stuttgart.
The ASE HRM claims to be an improvement on previous generations of ICP design, now incorporating a decoupled plasma source (patent pending).
[citation needed] The decoupled source generates high-density plasma which is allowed to diffuse into a separate process chamber.
Using a specialized chamber design, the excess ions (which negatively affect process control) are reduced, leaving a uniform distribution of fluorine free-radicals at a higher density than that available from the conventional ICP sources.