[3] The headquarters of the group are located in Oberkochen, Germany, with additional sites in the German cities Jena, Wetzlar, Rossdorf, Aachen, Coswig, Zurich (CH) Dublin (USA) and Bar Lev (Israel).

[4] About nine years later, the world's first predecessor to a modern wafer stepper, produced by David Mann (later GCA), was equipped with optics from Carl Zeiss.

Just under ten years later, ZEISS and Philips carve-out company ASML entered into a strategic partnership.

In 2017 ASML purchased a minority stake in Carl Zeiss SMT to strengthen their strategic partnership.

[9] This area develops and manufactures systems that analyze and repair defects on photomasks and measure and optimize defined mask properties.