In its major use, it is mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing.

[4] Stock and Somieski completed the hydrolysis of dichlorosilane by putting the solution of H2SiCl2 in benzene in brief contact with a large excess of water.

[5] The hydrolysis of dichlorosilane in diethyl ether, dichloromethane, or pentane gives cyclic and linear polysiloxanes.

[5] Su and Schlegal studied the decomposition of dichlorosilane using transition state theory (TST) using calculations at the G2 level.

[6] Dichlorosilane must be ultrapurified and concentrated in order to be used for the manufacturing of semiconducting[4] epitaxial silicon layers, which are used for microelectronics.