[3] The present masonry structure was built during the Chola dynasty in the 9th century, while later expansions are attributed to Vijayanagar rulers.

The temple is maintained and administered by the Hindu Religious and Charitable Endowments Department of the Government of Tamil Nadu.

[4] Legend has it that once Parvati, the consort of Shiva, wanted to expiate herself from sin by doing penance under a mango tree near Vegavati river.

He was divinely tricked by Shiva appearing as an aged brahmin and asked him to wash before dawn.

The temple finds mention in the classical Tamil Sangam literature dated 300 BCE like Manimegalai and Perumpāṇāṟṟuppaṭai.

[9] There are inscriptions dated 1532 CE (record 544 of 1919) indicating the gift of number of villages made by Achutaraya.

At the later stage a similar temple with same name Ekambareswarar was constructed in Chennai by Pachiappa Mudaliar in order to avoid travelling time to Kanchipuram.

The Archaeological Survey of India report of 1905–06 indicates widespread renovation activities carried out in the temple by Nattukottai Chettiars.

[13] In modern times, the temple is maintained and administered by the Hindu Religious and Charitable Endowments Department of the Government of Tamil Nadu.

[15] The Aayiram Kaal Mandapam, or the "hallway with a thousand pillars", which was built by the Vijayanagar Kings, is found on precinct after the gateway tower.

There is a shrine called Thirukachi Mayanam and Kalayana Mandapa, named after Pachayappa Mudaliar, both of which are located close to the flag staff.

The hall of the flagstaff has pillars sculpted with intricate figures indicating various legends and avatars of Shiva.

Vishnu is prayed as Vamana and the shrine is hailed by the Alvar saints as one of the 108 Divya Desams.

[1][7][12][18][19] Pancha Bhoota Stalam refers to the five Shiva temples,[20] each representing the manifestation of the five prime elements of nature - land, water, air, sky, fire.

[25] Tirugnana Sambandar, a 7th-century Tamil Saivite poet, venerated Ekambareswarar in ten verses in Tevaram, compiled as the First Tirumurai.

The presiding deity is also revered in the verses of famous folk singer Kanchi Kotayappa Nayak, one of the trinities of Carnatic music Muthuswami Dikshitar and Pattinathar.

Like other Shiva temples of Tamil Nadu, the priests belong to the Shaivaite community, a Brahmin sub-caste.

The temple rituals are performed six times a day; Ushathkalam at 5:30 a.m., Kalasanthi at 8:00 a.m., Ucchikalam at 10:00 a.m., Sayarakshai at 6:00 p.m., Irandamkalam at 8:00 p.m. and Ardha Jamam at 10:00 p.m. Each ritual comprises four steps: abhishekam (sacred bath), alankaram (decoration), naivedyam (food offering) and deepa aradhanai (waving of lamps) for the pedestal of Ekambareswarar.

During the fifth day, Ekambareswarar is carried silver mount Nandi during the morning and Ravaneswara Vahanam during the evening.

The 63 Nayanmars are taken in procession the sixth day morning, while Ekambareswarar is carried on Silver car festival in the evening.