When asked to design a drying apparatus, the principals of Fluoroware agreed to do so and established FSI International in 1973 to market this new product.
The company's offerings expanded to meet the market need for equipment used in the fabrication of microelectronics.
In the 1990s, the company relocated from its original facility overlooking Hazeltine Lake to a larger site nearby.
[2][3] FSI International supplied wafer cleaning equipment, using wet, cryogenic or other chemistry techniques.
The five main series of equipment produced by the company are: ZETA, MERCURY, ORION, ANTARES, and POLARIS, and in earlier years, the company also produced the SATURN and NEPTUNE processing systems.