Linear stage

In common usage, the term linear stage may or may not also include the mechanism by which the position of the platform is controlled relative to the base.

The position of the moving platform relative to the fixed base is typically controlled by a linear actuator of some form, whether manual, motorized, or hydraulic/pneumatic.

In manual linear stages, a control knob attached to a lead screw is typically used.

Stages designed to be mounted vertically use a slightly different arrangement, where the actuator is attached to the movable platform and its tip rests on a metal pad on the fixed base.

In some automated stages a stepper motor may be used in place of, or in addition to a manual knob.

In other automated stages a DC motor may be used in place of a manual control knob.

By combining linear and rotary elements in various ways, four-axis, five-axis, and six-axis stages are also possible.

Linear stages are used in semiconductor devices fabrication process for precise linear positioning of wafers of the purposes of wafer mapping dielectric, characterization, and epitaxial layer monitoring where positioning speed and precision are critical.