A microactuator is a microscopic servomechanism that supplies and transmits a measured amount of energy for the operation of another mechanism or system.
As a general actuator, following standards have to be met: For microactuator, there are two in addition The basic principle can be described as the expression for mechanical work
=
since an actuator is to manipulate positions and therefore force is needed.
For different kind of microactuators, different physical principles are applied.