They form covalent silicon–oxygen bonds to free hydroxyl (–OH) groups, such as the surfaces of glass, ceramics, or silica.

Due to its heavily fluorinated tail group, a FDTS monolayer reduces surface energy.

The process is usually carried out in a vacuum chamber and assisted by the presence of water vapor.

For this reason, a FDTS monolayer is often applied to movable microparts of microelectromechanical systems (MEMS).

[3] A FDTS monolayer reduces surface energy and prevents sticking, so they are used to coat micro- and nano-features on stamps for a nanoimprint lithography which is becoming a method of choice for making electronics, organic photodiodes, microfluidics and other.