Photo-reflectance

The pump light is typically modulated at a known frequency so that a lock-in amplifier may be used to suppress unwanted noise, resulting in the ability to detect reflectance changes at the ppm level.

In particular, conventional photo-reflectance is closely related to electroreflectance[1][2][3][4] in that the sample's internal electric field is modulated by the photo-injection of electron-hole pairs.

[7][8][9][10][11] Photo-reflectance spectroscopy has been used to determine semiconductor bandstructures, internal electric fields, and other material properties such as crystallinity, composition, physical strain, and doping concentration.

[19] Photo-reflectance is a particularly convenient type of modulation spectroscopy, as it may be performed at room temperature and only requires the sample have a reflecting surface.

The measured signal ΔR is the change in amplitude of the reflected probe light as the intensity modulated pump radiation interacts with the sample.

[23][24] The conventional photo-reflectance experimental setup uses a xenon or tungsten based lamp source passed through a monochromator to form the incident probe beam.

The reflected probe beam is collected and passed through an optical filter to eliminate any unwanted pump light and/or photoluminescence signal.

The electrical signal is processed to eliminate unwanted noise, typically using a lock-in circuit referenced to the modulation frequency.

Photo-reflectance is a highly sensitive measurement technique and provides unmatched capability for characterizing the material and electronic properties of thin films.

At this wavelength the electro-modulation signal is dominant, which enabled the Xitronix system to precisely measure active doping concentration in diffusion-less annealing processes.

[35] More recently, the use of laser photo-reflectance technology for precision measurement of carrier diffusion lengths, recombination lifetimes, and mobilities has been demonstrated.

By fitting spectroscopic photo-reflectance data with the conventional third derivative functional form, a comprehensive set of interband transition energies, amplitudes, and widths may be obtained, providing an essentially complete characterization of the electronic properties of the sample of interest.

Moreover, in commonly encountered situations, the coherent wavefront of laser probe beam may be used to isolate the refractive component of the photo-reflectance signal, greatly simplifying the data analysis.