Surface micromachining builds microstructures by deposition and etching structural layers over a substrate.
The main advantage of this machining process is the ability to build electronic and mechanical components (functions) on the same substrate.
This technology can also be used for the manufacture of thin film solar cells, which can be deposited on glass, polyethylene terepthalate substrates or other non-rigid materials.
Surface micro-machining uses developed technology (although sometimes not enough for demanding applications) which is easily repeatable for volume production.
For example, a suspended cantilever can be built by depositing and structuring a sacrificial layer, which is then selectively removed at the locations where the future beams must be attached to the substrate (i.e. the anchor points).