Aluminium gallium nitride (AlGaN) is a semiconductor material.
[1] AlGaN is used to manufacture light-emitting diodes operating in blue to ultraviolet region, where wavelengths down to 250 nm (far UV) were achieved, and some reports down to 222 nm.
It is also used in detectors of ultraviolet radiation, and in AlGaN/GaN High-electron-mobility transistors.
The AlGaN dust is an irritant to skin, eyes and lungs.
The environment, health and safety aspects of aluminium gallium nitride sources (such as trimethylgallium and ammonia) and industrial hygiene monitoring studies of standard MOVPE sources have been reported recently in a review.