They are devices that are used for conveying electronic grade metalorganic compounds from a liquid or solid precursor into a usable vapor.
The container of the Bubblers is similar to the construction of a gas washing bottle and used for the protected storage of metalorganic compounds to exclude air (oxygen, moisture).
For example, during the production of high brightness light emitting diodes, gallium or other group III-V elements are epitaxially deposited onto a single crystal silicon substrate.
This vapor is generated by bubbling an inert carrier gas (such as nitrogen or argon) through a cylinder with a dip tube through a metalorganic precursor, such as trimethylgallium.
The inert carrier gas and the metalorganic vapor is then introduced into the MOVPE (or MOCVD) reactor chamber during the production of high brightness LEDs.