It has manufacturing, customer service and/or research facilities in the United States, Canada, China, Germany, Israel, Japan, Malaysia, Singapore, South Korea, and Taiwan.

The company seeks to help manufacturers increase their yields by improving contamination control in several key processes, including photolithography, wet etch and clean, chemical-mechanical planarization, thin-film deposition, bulk chemical processing, wafer and reticle handling and shipping, and testing, assembly and packaging.

Entegris products include: filtration products that purify process gases and fluids, as well as the ambient environment; liquid systems and components that dispense, control, or transport process fluids; high-performance materials and specialty gas management solutions[buzzword]; wafer carriers and shippers that protect the semiconductor wafer from contamination and breakage; and specialized graphite, silicon carbide, and coatings.

In August 2005, Entegris merged with Mykrolis Corporation, a publicly held supplier of filtration products to the semiconductor industry.

On April 30, 2014, Entegris acquired Danbury, Connecticut-based ATMI, a publicly held company providing critical materials and materials-handling solutions[buzzword] to the semiconductor industry, in a $1.1 billion transaction.