Lutetium(III) fluoride is an inorganic compound with a chemical formula LuF3.

Lutetium(III) fluoride can be produced by reacting lutetium oxide with hydrogen fluoride, or reacting lutetium chloride and hydrofluoric acid:[3] It can also be produced by reacting lutetium sulfide and hydrofluoric acid:[4] Lutetium oxide and nitrogen trifluoride react at 240 °C to produce LuOF.

A second step happens below 460 °C to produce LuF3.

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