Mass flow controller

All mass flow controllers have an inlet port, an outlet port, a mass flow sensor and a proportional control valve.

The MFC is fitted with a closed loop control system which is given an input signal by the operator (or an external circuit/computer) that it compares to the value from the mass flow sensor and adjusts the proportional valve accordingly to achieve the required flow.

Mass flow controllers require the supply gas or liquid to be within a specific pressure range.

Low pressure will starve the MFC of fluid and cause it to fail to achieve its setpoint.

Those technologies define the types of Mass Flow Controllers, and they include differential pressure (ΔP), differential temperature (ΔT), Coriolis, Ultrasonic, electromagnetic, turbine, etc.