Octafluorocyclobutane is produced by the dimerization of tetrafluoroethylene and the reductive coupling of 1,2-dichloro-1,1,2,2-tetrafluoroethane.

[1] In the production of semiconductor materials and devices, octafluorocyclobutane serves as a deposition gas and etchant.

Exploiting its volatility and chemical inertness, octafluorocyclobutane may be found in some aerosolized foods.

It is listed by the Codex Alimentarius under number 946 (E946 for EU).

It is investigated as a possible replacement for sulfur hexafluoride as a dielectric gas.