[1][2] Methyltrimethoxysilane is usually prepared from methyltrichlorosilane and methanol: Alcoholysis of alkylchlorosilanes typically proceeds via an SN2 mechanism.

Inversion of the configuration is favored during nucleophilic attack when displacing good leaving groups, such as chloride.

[3] In contrast, displacement of poor leaving groups, such as alkoxide, retention is favored.

Hydrolysis of MTM proceeds both under acidic and basic conditions.

Under acid conditions, rates of successive hydrolyses for methyltrimethoxysilane decreases with each step.