Feature-oriented scanning

Feature-oriented scanning (FOS) is a method of precision measurement of surface topography with a scanning probe microscope in which surface features (objects) are used as reference points for microscope probe attachment.

This approach allows to scan an intended area of a surface by parts and then reconstruct the whole image from the obtained fragments.

Beside the mentioned, it is acceptable to use another name for the method – object-oriented scanning (OOS).

Any topography element that looks like a hill or a pit in wide sense may be taken as a surface feature.

Examples of surface features (objects) are: atoms, interstices, molecules, grains, nanoparticles, clusters, crystallites, quantum dots, nanoislets, pillars, pores, short nanowires, short nanorods, short nanotubes, viruses, bacteria, organelles, cells, etc.

FOS is designed for high-precision measurement of surface topography (see Fig.)

Moreover, in comparison with the conventional scanning, FOS allows obtaining a higher spatial resolution.

Thanks to a number of techniques embedded in FOS, the distortions caused by thermal drifts and creeps are practically eliminated.

FOS has the following fields of application: surface metrology, precise probe positioning, automatic surface characterization, automatic surface modification/stimulation, automatic manipulation of nanoobjects, nanotechnological processes of “bottom-up” assembly, coordinated control of analytical and technological probes in multiprobe instruments, control of atomic/molecular assemblers, control of probe nanolithographs, etc.

"Feature-oriented scanning methodology for probe microscopy and nanotechnology" (PDF).

"Automatic drift elimination in probe microscope images based on techniques of counter-scanning and topography feature recognition" (PDF).

"Feature-oriented scanning probe microscopy" (PDF).

"Feature-oriented scanning probe microscopy: precision measurements, nanometrology, bottom-up nanotechnologies".

Electronics: Science, Technology, Business (Special issue “50 years of the Institute of Physical Problems”).

"Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Approach description" (PDF).

"Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Virtual mode" (PDF).

"Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Real mode".

"Availability of feature-oriented scanning probe microscopy for remote-controlled measurements on board a space laboratory or planet exploration rover" (PDF).

"Observation of a hexagonal superstructure on pyrolytic graphite by method of feature-oriented scanning tunneling microscopy" (PDF).

June 2–6, Chernogolovka, Russia: Russian Academy of Sciences.

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"Direct measurement of surface diffusion using atom-tracking scanning tunneling microscopy".

"A survey of non-raster scan methods with application to atomic force microscopy".

Proceedings of the American Control Conference (ACC '07).

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Image of carbon film surface obtained by FOS method (AFM, tapping mode). Carbon clusters (hills) and intercluster spaces (pits) are used as surface features.
Typical atomic force microscopy set-up
Typical atomic force microscopy set-up