Feature-oriented scanning (FOS) is a method of precision measurement of surface topography with a scanning probe microscope in which surface features (objects) are used as reference points for microscope probe attachment.
This approach allows to scan an intended area of a surface by parts and then reconstruct the whole image from the obtained fragments.
Beside the mentioned, it is acceptable to use another name for the method – object-oriented scanning (OOS).
Any topography element that looks like a hill or a pit in wide sense may be taken as a surface feature.
Examples of surface features (objects) are: atoms, interstices, molecules, grains, nanoparticles, clusters, crystallites, quantum dots, nanoislets, pillars, pores, short nanowires, short nanorods, short nanotubes, viruses, bacteria, organelles, cells, etc.
FOS is designed for high-precision measurement of surface topography (see Fig.)
Moreover, in comparison with the conventional scanning, FOS allows obtaining a higher spatial resolution.
Thanks to a number of techniques embedded in FOS, the distortions caused by thermal drifts and creeps are practically eliminated.
FOS has the following fields of application: surface metrology, precise probe positioning, automatic surface characterization, automatic surface modification/stimulation, automatic manipulation of nanoobjects, nanotechnological processes of “bottom-up” assembly, coordinated control of analytical and technological probes in multiprobe instruments, control of atomic/molecular assemblers, control of probe nanolithographs, etc.
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June 2–6, Chernogolovka, Russia: Russian Academy of Sciences.
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