Multibeam is an American corporation that engages in the design, manufacture, and sale of semiconductor processing equipment used in the fabrication of integrated circuits.
Multibeam shipped its first MEBL platform to SkyWater Technology, in Bloomington, Minnesota, in July 2024.
[1] Multibeam developed miniature, all-electrostatic columns for e-beam lithography, that provide a maskless and high throughput platform for writing nanoscale IC patterns seamlessly across full wafers.
Arrays of e-beam columns operate simultaneously and in parallel to increase wafer processing speed.
With over 35 patents issued,[2] these multi-column e-beam lithography (MEBL) systems enable an array of direct write lithography applications, including Complementary E-Beam Lithography (CEBL), Secure Chip ID, Advanced Packaging Interposers, Photonics, and other applications where precise, nanometer-scale features are required.