Also known as 'layer-plus-island growth', the SK mode follows a two step process: initially, complete films of adsorbates, up to several monolayers thick, grow in a layer-by-layer fashion on a crystal substrate.
Beyond a critical layer thickness, which depends on strain and the chemical potential of the deposited film, growth continues through the nucleation and coalescence of adsorbate 'islands'.
[5] It wasn't until 1958 however, in a seminal work by Ernst Bauer published in Zeitschrift für Kristallographie, that the SK, Volmer–Weber, and Frank–van der Merwe mechanisms were systematically classified as the primary thin-film growth processes.
[6] Since then, SK growth has been the subject of intense investigation, not only to better understand the complex thermodynamics and kinetics at the core of thin-film formation, but also as a route to fabricating novel nanostructures for application in the microelectronics industry.
[3] Growth of these clusters, along with coarsening, will cause rough multi-layer films to grow on the substrate surface.
Antithetically, during Frank–van der Merwe (FM) growth, adatoms attach preferentially to surface sites resulting in atomically smooth, fully formed layers.
Transition from the layer-by-layer to island-based growth occurs at a critical layer thickness which is highly dependent on the chemical and physical properties, such as surface energies and lattice parameters, of the substrate and film.
Determining the mechanism by which a thin film grows requires consideration of the chemical potentials of the first few deposited layers.
While initial film growth follows an FM mechanism, i.e. positive differential μ, nontrivial amounts of strain energy accumulate in the deposited layers.
At a critical thickness, this strain induces a sign reversal in the chemical potential, i.e. negative differential μ, leading to a switch in the growth mode.
[7] A thermodynamic criterion for layer growth similar to the one presented above can be obtained using a force balance of surface tensions and contact angle.
[8] Since the formation of wetting layers occurs in a commensurate fashion at a crystal surface, there is often an associated misfit between the film and the substrate due to the different lattice parameters of each material.
In some cases, most notably the Si/Ge system, nanoscale dislocation-free islands can be formed during SK growth by introducing undulations into the near surface layers of the substrate.
[7] The resulting islands are coherent and defect-free, garnering them significant interest for use in nanoscale electronic and optoelectronic devices.
A schematic of the resulting epitaxial structure is shown in figure 3 which highlights the induced radius of curvature at the substrate surface and in the island.
AES data obtained in situ during film growth in a number model systems, such as Pd/W(100), Pb/Cu(110), Ag/W(110), and Ag/Fe(110), show characteristic segmented curves like those presented in figure 4.
[1][2][11] Height of the film Auger peaks plotted as a function of surface coverage Θ, initially exhibits a straight line, which is indicative of AES data for FM growth.
There is a clear break point at a critical adsorbate surface coverage followed by another linear segment at a reduced slope.
In some systems, reorganization of the 2D wetting layer results in decreasing AES peaks with increasing adsorbate coverage.
[11] Such situations arise when many adatoms are required to reach a critical nucleus size on the surface and at nucleation the resulting adsorbed layer constitutes a significant fraction of a monolayer.
Diffraction data obtained via various LEED experiments have been effectively used in conjunction with AES to measure the critical layer thickness at the onset of island formation.
[2][11] In addition, RHEED oscillations have proven very sensitive to the layer-to-island transition during SK growth, with the diffraction data providing detailed crystallographic information about the nucleated islands.
Following the time dependence of LEED, RHEED, and AES signals, extensive information on surface kinetics and thermodynamics has been gathered for a number of technologically relevant systems.
[1][3][11] The extreme magnifications afforded by these techniques, often down to the nanometer length scale, make them particularly applicable for visualizing the strongly 3D islands.
[1][2][3] AFM and STM have become increasingly utilized to correlate island geometry to the surface morphology of the surrounding substrate and wetting layer.
As mentioned previously, coherent island formation during SK growth has attracted increased interest as a means for fabricating epitaxial nanoscale structures, particularly quantum dots (QDs).
[17] Significant effort has been spent developing methods to control island organization, density, and size on a substrate.
Techniques such as surface dimpling with a pulsed laser and control over growth rate have been successfully applied to alter the onset of the SK transition or even suppress it altogether.
[14][18] The ability to control this transition either spatially or temporally enables manipulation of physical parameters of the nanostructures, like geometry and size, which, in turn, can alter their electronic or optoelectronic properties (i.e. band gap).
[14] Such ability to control the size, location, and shape of these structures could provide invaluable techniques for 'bottom-up' fabrication schemes of next-generation devices in the microelectronics industry.